OEM standard dimension and material specification. Compatible with specified AMAT process tool platform.
Ensure the stability of process chamber environment, guarantee wafer processing repeatability after replacement.
Applied Materials semiconductor deposition and etching equipment, fab equipment maintenance.
Good corrosion resistance, low particle generation, stable performance under high temperature and vacuum environment.
Precision mechanical part with special surface treatment, positioning structure matching the tool mounting base.
This component forms part of the reaction chamber or gas supply path, providing stable physical environment required for wafer fabrication process.
Operate in cleanroom environment. Clean the mating surface before installation. Follow OEM assembly procedure strictly.
Avoid scratch and contamination on functional surface. Handle carefully to prevent deformation.














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