Power supply: 24V DC
Operating temperature: 15°C to 35°C
Input signal: 4-20mA analog signal
Number of analog channels: 8 channels
Multi-channel analog signal acquisition and conversion. Pressure value real-time calculation and transmission. Over-range alarm function. Signal anti-interference processing for vacuum environment.
Vacuum chamber pressure monitoring module of TEL etcher, thin film deposition semiconductor equipment.
Conversion precision: ±0.1% full scale
Sampling frequency: 5kHz
Input impedance: 250Ω
Insulation resistance: ≥1000MΩ
Coated multi-layer PCB. Gold-plated edge connector for backplane plug-in. Front panel with status indicator lights. Standard card structure matching TEL chassis.
PCB: FR-4 flame retardant board. Connector: gold-plated copper alloy. Signal conditioning components: metal film resistor and precision operational amplifier chip.
It receives 4-20mA pressure analog signals from vacuum sensors, converts analog signals to digital values, transmits pressure data to main controller through internal bus, and triggers alarm when pressure exceeds preset threshold.
Insert into matched equipment backplane slot and lock front panel. Confirm the definition of analog wiring terminals. Complete wiring before power on. Keep cabinet sealed to reduce dust.
Power off before disassembly. Calibrate pressure channel periodically. Avoid electrostatic discharge damage to circuit. Do not operate in environment with corrosive vapor.
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