Technical Specifications
Standard analog output, dedicated pressure range for vacuum application. Rated operating temperature and supply voltage as per MKS factory datasheet. Compatible with common vacuum control system interfaces.
Functional Features
Accurate vacuum pressure sensing, stable analog output, good vibration resistance. Small footprint for integration inside process chambers and tool cabinets.
Application Scenarios
Semiconductor etching, PVD/CVD vacuum systems, analytical instruments, industrial vacuum process control.
Performance Parameters
Excellent long term stability, fast response, low noise output, high measurement repeatability.
Structural Characteristics
Stainless steel wetted material, compact form factor, built-in signal conditioning circuit, shielding metal enclosure.
Working Principle
Pressure variation acts on the sensing element, which converts mechanical deformation into proportional electrical signal. The conditioned signal is transmitted to PLC or process controller for pressure monitoring.
Installation Requirements
Install on non-vibration mounting bracket. Ensure vacuum connection is leak-tight. Complete wiring according to pin assignment. Prevent contact with incompatible corrosive media.
Usage Notes
Overpressure must be avoided. Protect the sensor from mechanical shock. Regular calibration is recommended. Cut off power supply before handling.
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