Technical Specifications
Measurement range matches the factory calibration of MKS 106M series. Output signal is standard analog signal. Operating temperature covers typical semiconductor tool ambient range. Electrical interface follows MKS industry standard connection definition.
Functional Features
Real-time pressure detection and analog signal output. High repeatability for continuous process monitoring. Resistant to minor vibration and electromagnetic interference. Easy installation and signal integration with host process controllers.
Application Scenarios
Semiconductor wafer processing equipment, vacuum deposition systems, etch tools, thin film manufacturing, industrial vacuum control loops.
Performance Parameters
High measurement accuracy, fast response time, long-term zero point stability, low temperature drift.
Structural Characteristics
Compact stainless steel sensing structure, standard process fitting port, integrated signal conversion circuit, metal housing for shielding.
Working Principle
The transducer converts pressure changes of the measured medium into electrical signals through internal sensing element. The signal is conditioned and amplified before transmission to the control system for pressure reading and regulation.
Installation Requirements
Mount on vibration-reduced mounting position. Seal the process port properly to avoid leakage. Follow specified wiring definition for power and signal connection. Keep away from corrosive gas exposure beyond rated specification.
Usage Notes
Do not apply pressure exceeding full scale range. Avoid physical impact on the sensing diaphragm. Calibration should be performed periodically. Disconnect power before disassembly or maintenance.
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