Technical Specifications Power Supply: 15V / 24V DC Operating Temperature: 10℃ ~ 60℃ Mounting: Flange or manifold threaded installation Gas Compatibility: Inert gas and halogen corrosive process gas
Functional Features High accuracy continuous vacuum pressure measurement. Convert pressure physical signal into standard analog/digital output. Low particle and low outgassing wetted surface. Strong chemical resistance to semiconductor corrosive process gas. Stable reading under thermal cycling and slight vibration. Integrated signal conditioning circuit for noise filtering.
Application Scenarios Semiconductor etch, CVD and PVD vacuum chamber pressure monitoring. Gas panel and vacuum manifold pressure measurement. MKS vacuum transducer spare parts for semiconductor fab maintenance. Wafer processing equipment vacuum monitoring subsystem. High-vacuum plasma process pressure control system.
Performance Parameters Measurement accuracy: High precision vacuum pressure reading Signal stability: Low drift under temperature cycling Leak performance: Satisfy high vacuum helium leak standard Chemical compatibility: Resist halogen process gas corrosion
Material Composition Wetted components: Electropolished high purity stainless steel or nickel alloy Sealing components: High purity fluoropolymer Internal circuit: Industrial grade signal processing PCB
Structural Characteristics Compact integrated vacuum transducer assembly. Electropolished ultra-clean gas contact surface. Built-in precision pressure sensing chip. Electrical connector for power supply and signal communication. Sealed outer housing to protect electronic circuit from contamination.
Working Principle The built-in pressure sensing element detects vacuum pressure variation in the process environment and generates raw electrical signal. The internal PCB conditions and filters the signal, outputs standardized signal to equipment controller to realize real-time pressure monitoring and process interlock.
Installation Requirements Inspect and clean the assembly in ISO cleanroom before installation. Check sealing surface for scratches, dents and impurities. Fix transducer at specified position with recommended torque. Complete power and signal wiring to the matching connector. Execute helium leak test after installation is finished.
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