Technical Specifications Power Supply: 15V / 24V DC Operating Temperature: 10℃ ~ 60℃ Mounting: Flange or manifold threaded mounting Gas Compatibility: Inert gas and halogen-containing corrosive process gas
Functional Features High-precision real-time vacuum pressure measurement. Convert physical pressure signal into standard analog or digital output. Low particle and low outgassing wetted surface. Good resistance to corrosive semiconductor process gas. Stable measurement performance during thermal cycling. Built-in signal conditioning circuit for signal output.
Application Scenarios Semiconductor plasma etch and CVD/PVD vacuum chamber. Wafer process equipment vacuum pressure monitoring subsystem. Gas delivery manifold and vacuum pipeline pressure detection. MKS vacuum measurement spare parts for fab maintenance. High-vacuum semiconductor process control equipment.
Material Composition Wetted components: Electropolished high purity stainless steel or nickel alloy Sealing elements: High purity fluoropolymer Internal PCB: Industrial grade signal processing circuit board
Structural Characteristics Compact flange mounted sensor assembly. Ultra-clean wetted surface for semiconductor process. Built-in precision pressure sensing element. Electrical connector for power supply and signal transmission. Sealed housing to protect internal electronic circuits.
Working Principle The internal pressure sensing element detects vacuum pressure variation inside chamber or pipeline, converts pressure physical quantity into electrical signal. The on-board circuit conditions the raw signal and transmits it to equipment controller for pressure display and closed-loop process regulation.
Installation Requirements Complete inspection and cleaning in ISO cleanroom before installation. Check flange sealing surface for scratches, dents and contamination. Align flange and tighten fasteners to specified torque value. Connect power and signal cable to the electrical connector. Conduct helium leak test after installation.
Usage Notes Handle the product only with cleanroom nitrile gloves. Protect flange sealing surface from scratches and impact damage. Avoid particle contamination entering internal gas path. Store spare sensor in sealed clean packaging. Prevent contact with grease and organic contaminants.
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