Technical Specifications Power Supply: 15V / 24V DC Operating Temperature: 10℃ ~ 60℃ Mounting: Chamber or manifold flange mounting Pressure Range: Vacuum range for semiconductor process Gas Compatibility: Inert gas and halogen process gas
Functional Features High precision real-time vacuum pressure measurement. Convert pressure value to standard analog or digital output signal. Low particle and low outgassing wetted surface. Resist corrosive semiconductor process gas. Stable measurement under thermal cycling. On-board signal conditioning circuit.
Application Scenarios Semiconductor plasma etch and deposition vacuum chamber. Wafer process equipment vacuum pressure monitoring subsystem. MKS vacuum measurement spare parts for fab maintenance. Gas manifold and vacuum line pressure monitoring. High vacuum semiconductor process control equipment.
Material Composition Wetted part: High purity electropolished stainless steel or nickel alloy Seal: High purity fluoropolymer Internal PCB: Industrial grade signal processing circuit board
Structural Characteristics Compact flange mounted sensor assembly. Ultra-clean wetted surface for semiconductor process. Built-in pressure sensing element. Electrical connector for power supply and signal output. Sealed housing to protect electronic circuit.
Working Principle The internal pressure sensing element detects vacuum pressure change inside chamber or pipeline, converts pressure physical quantity into electrical signal. On-board circuit conditions the signal and transmits to equipment controller for pressure display and closed-loop process control.
Installation Requirements Clean and inspect sensor in ISO cleanroom before installation. Check flange sealing surface for scratch and contamination. Align flange and tighten fasteners to specified torque. Connect power and signal cable to electrical connector. Carry out helium leak test after installation.
Usage Notes Handle only with cleanroom nitrile gloves. Protect flange sealing surface from scratch and impact. Avoid exposure to excessive particle contamination. Store spare sensor in sealed clean packaging. Prevent oil and organic contaminant contact.
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