Technical Specifications
Input voltage: 24V DC ±10%. Channels: 8 independent flow control channels. Communication interface: RS-485. Signal types: 0-10V analog, 4-20mA. Accuracy: ±0.2% full scale. Power dissipation: 8W. Operating temperature range: 15°C to +35°C. Storage temperature: -10°C to +60°C.
Functional Features
Eight-channel flow control for multi-gas process recipes. High-precision analog output for mass flow controller control. Built-in signal conditioning and isolation. On-board diagnostics for fault detection. Compatible with Lam 2300 and 9600 series platforms.
Application Scenarios
It is used in Lam Research dielectric etch systems, metal etch chambers, CVD deposition equipment, and semiconductor wafer processing tools requiring precise gas flow control.
Performance Parameters
Output accuracy: ±0.2% full scale. Update rate: 100ms per channel. Channel isolation: 500V AC. Operating temperature range: 15°C to +35°C.
Material Composition
PCB: FR-4 with solder mask. Components: industrial-grade analog and digital ICs. Connectors: gold-plated card edge and pin headers.
Structural Characteristics
It features standard semiconductor equipment PCB form factor, card edge connector, on-board status LEDs, and mounting holes for chassis installation.
Working Principle
It receives flow setpoint commands from the system controller, converts digital values to precision analog control signals, and drives mass flow controllers to regulate process gas flow into the process chamber. It also feeds back actual flow values to the controller for closed-loop control.
Installation Requirements
Install in designated card slot of Lam equipment chassis. Ensure card is fully seated in backplane connector. Connect gas flow controller cables to appropriate headers. Verify chassis grounding.
Usage Notes
Handle only with ESD protection to prevent component damage. Calibrate analog outputs periodically. Inspect connectors for contamination. Replace only with identical Lam spare part numbers.
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