Technical Specifications
Original Lam material and dimensional specification. Fit for specified Lam etch tool platform.
Support stable operation of wafer etch chamber, control gas distribution or vacuum sealing inside the process cavity.
Lam Research wafer etching tools, semiconductor fab chamber maintenance.
Low particle emission, resistant to process gas corrosion, precise machining tolerance.
Precision machined assembly component, special surface coating, locating structure matching chamber mounting position.
The component works inside the process chamber to form gas flow channel or sealing structure, maintaining required vacuum and gas environment for wafer etching.
Clean all mating surfaces before installation. Assembly in cleanroom environment. Follow OEM maintenance manual and torque requirement.
Do not touch functional surface with bare hands. Prevent mechanical impact and scratch.
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