Technical Specifications
Power supply: 24V DC
Operating temperature: 15°C to 35°C
Input signal: 4-20mA analog signal
Number of analog channels: 8 channels
Functional Features
Enhanced anti-electromagnetic interference performance. Multi-channel analog signal acquisition and digital conversion. Pressure over-range alarm. Circuit fault self-diagnosis function.
Application Scenarios
Vacuum chamber pressure monitoring for TEL etching and deposition semiconductor manufacturing equipment.
Performance Parameters
Conversion precision: ±0.08% full scale
Sampling frequency: 5kHz
Input impedance: 250Ω
Insulation resistance: ≥1000MΩ
Structural Characteristics
Conformal coated multi-layer PCB. Gold-plated edge card connector. Front panel LED status indicators. Standard plug-in card structure compatible with TEL equipment rack.
Material Composition
PCB substrate: FR-4 glass fiber board. Connector pins: gold plated copper alloy. Precision electronic components: silicon chip and metal film passive components.
Working Principle
It collects analog pressure signals from vacuum gauges, converts analog signals into digital data, transmits pressure information to host controller via internal backplane bus, and outputs alarm signal when pressure deviates from normal working range.
Installation Requirements
Insert the card into corresponding backplane slot and lock front panel. Verify analog sensor wiring definition. Power on after all wiring work finished. Ensure good cabinet sealing.
Usage Notes
Implement electrostatic protection during replacement. Cut off system power before plugging or unplugging. Perform regular channel calibration. Keep away from corrosive gas.
Implement electrostatic protection during replacement. Cut off system power before plugging or unplugging. Perform regular channel calibration. Keep away from corrosive gas.
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