Technical Specifications
Output power: 2kW per channel. Channels: 2 independent heater outputs. Input voltage: 208V AC 3-phase. Control input: 4-20mA. Accuracy: ±1% full scale. Switching: zero-cross SSR. Operating temperature: 15°C to +35°C.
Functional Features
Two-channel independent heater control. Zero-cross solid state switching for long life. Analog control input. Current monitoring per channel. Over-temperature protection.
Application Scenarios
It controls chamber heaters, wafer pedestals and thermal processing elements in Lam etch, deposition and thermal processing systems.
Performance Parameters
Power rating: 2kW per channel. Control accuracy: ±1%. Switching: zero-cross SSR. Operating temperature range: 15°C to +35°C.
Material Composition
PCB: heavy copper FR-4. Power devices: solid state relays. Connectors: high-current terminals.
Structural Characteristics
Power module PCB, status indicators, high-current terminals, card edge connector.
Working Principle
It receives 4-20mA control signals, varies the conduction angle of solid state relays to modulate AC power to the heater elements, maintaining process temperature per controller setpoint.
Installation Requirements
Install in power section of equipment cabinet. Connect heater elements and AC input. Wire control signal. Verify proper grounding.
Usage Notes
Do not exceed power rating. Ensure adequate heat sinking. Follow electrical safety procedures. Calibrate periodically.
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