Lam Research 810-073479-215 Vacuum Gauge Interface Module

Technical Specifications

Gauge types: Pirani, cold cathode. Measurement range: 1e-9 Torr to 1000 Torr. Output: 0-10V analog, RS-232 serial. Power supply: 24V DC. Power dissipation: 10W. Operating temperature: 15°C to +35°C.

Functional Features

Dual technology vacuum measurement. Wide dynamic range. Automatic gauge degas control. Pressure unit conversion. Analog and digital output.

Application Scenarios

It monitors chamber vacuum, foreline pressure and roughing vacuum levels in Lam etch, deposition and vacuum processing systems.

Performance Parameters

Range: 1e-9 to 1000 Torr. Accuracy: ±5% of reading. Update rate: 1 second. Operating temperature range: 15°C to +35°C.

Material Composition

PCB: FR-4. Components: high-voltage supply and measurement ICs. Connectors: high-voltage rated connectors.

Structural Characteristics

Module PCB, status display, gauge connectors, card edge interface.

Working Principle

It drives and receives signals from vacuum gauges, processes ionization and thermal conductivity measurements, calculates pressure values, and transmits vacuum data to the system controller.

Installation Requirements

Install in equipment card cage. Connect vacuum gauge cables. Degas gauges during commissioning. Calibrate per reference standard.