Lam Research 810-069751-114 Stepper Motor Drive Module

Product Brief Introduction The 810-069751-114 is a stepper motor drive module for Lam Research precision motion systems. It drives micro-stepping motors for fine-positioning applications such as wafer alignment, optics positioning and valve control.
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Technical Specifications

Phase: 2-phase bipolar. Current: 1.5A per phase. Step resolution: up to 256 microsteps. Input voltage: 24V DC. Control interface: pulse/direction. Power dissipation: 8W. Operating temperature: 15°C to +35°C.

Functional Features

Micro-stepping control for smooth high-resolution motion. Selectable step resolution. Current chopping for efficiency. Over-temperature and over-current protection. Status indicators.

Application Scenarios

It drives precision stepper motors in wafer aligners, optical positioning systems, gas valve actuators and fine-feed mechanisms in Lam semiconductor equipment.

Performance Parameters

Step resolution: up to 256 microsteps per full step. Current: 1.5A per phase. Operating temperature range: 15°C to +35°C.

Material Composition

PCB: FR-4. Power stage: bipolar power transistors. Connectors: pin headers.

Structural Characteristics

Compact module PCB, status LEDs, connector interface, mounting points.

Working Principle

It receives step and direction commands, commutates two-phase motor windings in micro-step sequence, and controls winding current via chopper regulation to produce precise incremental motor motion.

Installation Requirements

Mount in equipment chassis. Connect stepper motor cable. Set step resolution via DIP switches. Verify current setting.

Usage Notes

Set current appropriate for motor rating. Do not exceed maximum step rate. Inspect motor heating. Handle with ESD precautions.




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