Technical Specifications
Input channels: 6 pressure sensor inputs. Input types: 0-10V, 4-20mA. Resolution: 16-bit. Accuracy: ±0.1% full scale. Power supply: 24V DC. Power dissipation: 5W. Operating temperature: 15°C to +35°C.
Functional Features
Six-channel pressure signal conditioning. Built-in sensor excitation supply. Open circuit detection. Digital filtering for noise reduction. Compatible with standard industrial pressure transmitters.
Application Scenarios
It monitors process chamber pressure, foreline pressure, gas line pressure and vacuum levels in Lam etch, deposition and vacuum processing systems.
Performance Parameters
Measurement accuracy: ±0.1% full scale. Update rate: 100ms per channel. Resolution: 16-bit. Operating temperature range: 15°C to +35°C.
Material Composition
PCB: FR-4. Components: precision amplifiers and ADCs. Connectors: gold-plated terminals.
Structural Characteristics
Standard PCB form factor, status LEDs, card edge connector, mounting holes.
Working Principle
It excites and receives signals from pressure sensors, conditions and amplifies the analog signals, converts them to digital values via ADC, and transmits pressure data to the system controller.
Installation Requirements
Install in equipment chassis slot. Connect pressure sensor cables. Calibrate zero and span during commissioning. Verify system grounding.
Usage Notes
Calibrate periodically with reference standards. Inspect sensor wiring for leaks. Handle with ESD precautions.
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