Technical Specifications Measurement range: 1000mbar ~ 1×10⁻⁹mbar. Power supply:24V DC. Output: RS485 digital signal. Operating temperature:0~+50°C.
Functional Features Combined Pirani and cold cathode measurement. Wide vacuum range coverage. Digital communication. Built-in self-test. LED status indicator.
Application Scenarios Semiconductor process chamber, vacuum coating machine, high vacuum industrial processing equipment.
Performance Parameters High vacuum measurement accuracy ±15%. Operating temperature:0~+50°C.
Structural Characteristics Compact metal gauge body, vacuum flange interface, electrical connector, status LED.
Working Principle Pirani sensor measures rough and medium vacuum, cold cathode sensor measures high vacuum; gauge converts pressure value to digital data and transmits to equipment controller.
Installation Requirements Mount on vacuum chamber flange. Ensure vacuum sealing. Connect 24V DC and RS485 communication cable.
Usage Notes Avoid contamination of gauge sensor. Do not expose to corrosive gas. Perform zero calibration periodically.
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