Technical Specifications
Measurement range: 1×10⁻⁷ Torr to 1×10⁻² Torr. Accuracy: ±10% of reading. Output: 0-10V analog, RS-232 serial. Power supply: 24V DC. Fitting: KF-16 flange. Operating temperature range: 0°C to +50°C.
Functional Features
Wide measurement range covers high to medium vacuum. Combined analog and digital output interface. Zero adjustment and sensitivity calibration. Compact size minimizes mounting space. Gold-plated grid for long life and stability.
Application Scenarios
It is used in semiconductor process equipment, vacuum coating systems, vacuum furnaces, research laboratory vacuum systems, leak detection systems and space simulation chambers.
Performance Parameters
Range: 10⁻⁷ to 10⁻² Torr. Zero drift: <1% per month. Response time: <1 second. Repeatability: ±2% of reading. Operating temperature range: 0°C to +50°C.
Material Composition
Tube: glass and 304 stainless steel. Flange: 304 stainless steel. Electrodes: tungsten and molybdenum. Housing: anodized aluminum. Seal: gold-plated copper.
Structural Characteristics
It features an all-metal sealed tube assembly, KF flange vacuum fitting, integrated electronics housing, and electrical cable exit.
Working Principle
A heated cathode emits electrons that ionize residual gas molecules. Positively charged ions are collected at the grid electrode, producing an ion current proportional to gas pressure. The electronics measure this current and output a linear signal proportional to vacuum pressure.
Installation Requirements
Mount with tube oriented vertically, cathode downward. Connect to vacuum system with KF flange and centering ring. Leak check after installation. Connect 24V DC power and output cable. Allow warm-up time before use.
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