The LAM Research 853-049542-173 Spectrometer Module delivers high-precision spectral analysis for industrial manufacturing environments. Designed for semiconductor production, this module provides critical measurement capabilities for material testing, quality assurance, and process control applications.
Technical Specifications
| Attribute | Value |
| Brand | LAM Research |
| Model | 853-049542-173 |
| Module Category | Spectrometer Module |
| Operating Voltage | 220V |
| Output Frequency | 50kHz |
| Certification | Industry Certified |


Applications & Features
Engineered for semiconductor manufacturing, this module integrates seamlessly into automated production lines requiring precision spectral analysis. Key applications include thin-film measurement, plasma monitoring, and process endpoint detection. The shock-resistant construction and thermal stability ensure reliable performance in harsh environments. Commonly paired with LAM Research 2300® series etch and deposition systems, it supports quick component replacement and simplified maintenance protocols.
Our Services
Apex Automation specializes in ready-to-ship industrial automation solutions since 2014. We provide:
- Expert pre-sales technical consultation
- 1-year comprehensive warranty on all products
- Priority after-sales support with 72-hour response guarantee
- Sourcing services for obsolete or specialized equipment
For pricing details or alternative model requests, contact us via WhatsApp. Email inquiries: anikaqx@gmail.com. We source specialized components within 48 hours.

















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